Electron Probe Micro Analyzer (EPMA)

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EPMA is a fully qualitative and quantitative method of non-destructive elemental analysis of micron-sized volumes at the surface of materials, with sensitivity at the level of ppm. Routine quantification to 1% reproducibility is obtained over several days. It is the most precise and accurate micro-analysis technique available and all elements from B to U and above can be analyzed.

Electron Probe Micro Analyzer (EPMA) Types