Low Energy Electron Induces X-Ray Emission Spectrometry (LEXES

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Low Energy Electron Induced X-ray Emission Spectrometry (LEXES) consists of an irradiating solid sample by a low energy electron beam and analyzing the soft X-rays emitted by the target. One major application of the LEXES technique is the fast quantitative dose measurement of ultra-shallow implants over a wide dose range, with or without annealing.

Low Energy Electron Induces X-Ray Emission Spectrometry (LEXES Types