Secondary Ion Mass Spectrometry (SIMS)

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Secondary Ion Mass Spectrometry consists of analyzing these secondary ions with a mass spectrometer. Secondary ion emission by a solid surface under ion bombardment supplies information about the elemental, isotopic and molecular composition of its uppermost atomic layers. The SIMS technique provides a unique combination of extremely high sensitivity for all elements from Hydrogen to Uranium and above, high lateral resolution imaging, and a very low background that allows high dynamic range.

Secondary Ion Mass Spectrometry (SIMS) Types