Cameca Microanalytic Instrumentation and Metrology


Cameca Microanalytic Instrumentation and Metrology

PT Fajar Mas Murni as a well-known trading company not only sells products but also provides Service and After Market Sales services and provides spare parts. PT FMM has several facilities such as workshops to support sales and after market activities, it is not uncommon for customers to "witness" to the FMM office to see PT Fajar Mas Murni's work facilities and test the products to be purchased.

CAMECA is the world's leading supplier of microanalytic and metrological instrumentation in research and process control. Their instruments measure the elemental and isotopic compositions in materials to atomic resolution, complementing government and university laboratories and high-tech industrial companies around the world.

Since its founding in 1929, CAMECA has been renowned for its precision mechanics, optics and electronics. The company started in France as a cinema projector manufacturer, before rapidly growing to become a provider of scientific instrumentation to the international research community and in-fab/near-fab metrology solutions to the semiconductor manufacturing industry.

CAMECA has sales & service locations in Brazil, China, Germany, India, Japan, Korea, Taiwan, USA, Indonesia and an extensive network of agents. Ensure the best level of support for all users. Their mission is to focus on instrumental development to offer customers the highest analytical performance in the area of special characterization.

PT Fajar Mas Murni is trusted by CAMECA to be their product sales agent in Indonesia. Here we will briefly review the available CAMECA products to be your choice and recommendation for your needs:

1. Low Energy Electron Induces X-Ray Emission Spectrometry (LEXES)

Low Energy Electron Induced X-ray Emission Spectrometry (LEXES) consists of an irradiating solid sample by a low energy electron beam and analyzing the soft X-rays emitted by the target. One major application of the LEXES technique is the fast quantitative dose measurement of ultra-shallow implants over a wide dose range, with or without annealing.

2. 3D Atomic Probe Tomography (APT)

Atom Probe Tomography (APT or 3D Atom Probe) is the only material analysis technique offering extensive capabilities for both 3D imaging and chemical composition measurements at the atomic scale (around 0,1-0,3nm resolution in depth and 0,3-0,5nm laterally). Since its early developments, Atom Probe Tomography has contributed to major advances in materials science.

3. Secondary Ion Mass Spectrometry (SIMS)

Secondary Ion Mass Spectrometry consists of analyzing these secondary ions with a mass spectrometer. Secondary ion emission by a solid surface under ion bombardment supplies information about the elemental, isotopic and molecular composition of its uppermost atomic layers. The SIMS technique provides a unique combination of extremely high sensitivity for all elements from Hydrogen to Uranium and above, high lateral resolution imaging, and a very low background that allows high dynamic range.

4. Electron Probe Micro Analyzer (EPMA)

EPMA is a fully qualitative and quantitative method of non-destructive elemental analysis of micron-sized volumes at the surface of materials, with sensitivity at the level of ppm. Routine quantification to 1% reproducibility is obtained over several days. It is the most precise and accurate micro-analysis technique available and all elements from B to U and above can be analyzed.

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