Focused Ion & Electron Beam (FIB)

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High-precision Focused Ion Beam Scanning Electron Microscopes (FIB-SEM) with real-time SEM observation. Hitachi FIB has various model: single beam system and multiple beam system. Hitachi FIB also completed with micro-sampling system for preparing the desired wafer part for analysis with STEM, TEM, etc. by extracting a micro sample with an ion beam in the vacuum chamber of an FIB system.

Focused Ion & Electron Beam (FIB) Types