Focused Ion & Electron Beam (FIB)


High-precision Focused Ion Beam Scanning Electron Microscopes (FIB-SEM) with real-time SEM observation. Hitachi FIB has various model: single beam system and multiple beam system. Hitachi FIB also completed with micro-sampling system for preparing the desired wafer part for analysis with STEM, TEM, etc. by extracting a micro sample with an ion beam in the vacuum chamber of an FIB system.

Focused Ion & Electron Beam (FIB) Types

Real-time 3D analystical FIB-SEM NX9000


Focused Ion and Electron Beam System Ethox NX5000 Series