Atomic Force Microscopes (AFM5500M)
Product Description
The is an AFM platform equipped with a fully addressable 4-inch stage, optimized for medium-sized samples. It affords exceptional levels of ease of use, automation and accuracy as well as correlation fo AFM/SEM investigations.
Specification
| General Characteristic | |
|---|---|
| Stage | Diameter: 100 mm (4 inch) Thickness: 20 mm Weight: 2 kg |
| Scan Range | 200 µm x 200 µm x 15 µm (XY: Closed loop control, Z: Displacement sensor) |
| RMS Noice Level* | ≤0.04 nm (High-resolution mode) |
| Repeatability* | XY: ≤15 nm(3σ, measuring 10 µm pitch)/Z: ≤1 nm (3σ, measuring 100 nm depth) |
| XY Orthogonality | ±0.5° |
| Detection | Optical lever (Low-coherence light) |
| Bow* | ≤2 nm/50 µm |
| Top-view Optical Microscope | Zoom magnification: x1 to x7 |
Resources
| Atomic Force Microscope AFM5500M.pdf |
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