SEM SU3800

SEM SU3800


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Product Description

Hitachi High-Tech's scanning electron microscopes SU3800/SU3900 deliver both operability and expandability. The operator can automate many operations and efficiently utilize their high performance. The SU3900 is equipped with a large multipurpose specimen chamber to accommodate observation of large samples.

Specification

General Characteristic
Secondary Electron Resolution

3.0 nm (accelerating voltage 30 kV, WD=5 mm, high vacuum mode)

15.0 nm (accelerating voltage 1 kV, WD=5 mm, high vacuum mode)

Backscattered Electron Resolution

4.0 nm (accelerating voltage 30 kV, WD=5 mm, low vacuum mode)

Magnification

×5 to ×300,000 (magnification of image*1)

×7 to ×800,000 (magnification of actual display*2)

Accelerating Voltage range

0.3 kV to 30 kV

Low Vacuum Mode Setting

6 to 650 Pa

Image Shift

± 75 µm (WD=10 mm)

Max. specimen size

Φ 200 mm

Specimen stage

X : 0 to 100 mm

Y : 0 to 50 mm

Z : 5 to 65 mm

R : 360° in continuous mode

T : -20 to +90°

Max. Movable Range : Φ 130 mm (in combination with R)

Max. Movable Height : 80 mm (WD= 10 mm)

Motor Drive : 5-axis motor drive

Electron Optics

Electron-Gun : Pre-centered cartridge type tungsten hairpin filament

Objective-Lens Aperture : 4-hole movable aperture

Detectors : Secondary electron detector, sensitive semiconductor backscattered electron detector

WD for EDX analysis : WD = 10mm (T.O.A = 35°)

Image display

Auto-Axis Alignment Function

Beam control : auto (AFS→ABA→AFC→ABCC)

Optical axis adjustment: auto (current alignment)

Beam brightness: auto

Auto Image Adjustment Function

Auto brightness and contrast control (ABCC)

Auto focus control (AFC)

Auto stigma and focus (ASF)

Auto filament saturation (AFS)

Auto beam alignment (ABA)

Auto start (HV-ON→ABCC→AFC)

Resources

Scanning Electron Microscope SU3800 & SU3900.pdf

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