10 – 600.000 X (based on 4” x 5” picture)
18 – 1.000.000 X (800x600 pixels on display)/30 – 1.500.000 X (1,280x960 pixels on display)

1.2 nm @30 kV
3.0 nm @ 1kV
2.0 nm @ 1kV with deceleration mode*1
3.0 nm @ 15 kV Variable Pressure mode*2

ZrO / W Schottky emitter

0.5 – 30 kV (0.1 kV step)

0.1 – 2.0 kV with deceleration mode

> 200 nA

Everhart Thornley SE detector (Lower detector);
Top Detector for high resolution imaging Through the lens*1;
Ultra Variable-pressure Detector (UVD)*3;
Retractable five segment Backscattered Electron Detector (PD-BSE)*4;
Energy Dispersive X-ray detector (EDS)*3;
Wavelength Dispersive X-ray detector (WDS)*3;
Electron Backscattered Diffraction Pattern Detector (EBSD)*3

Pressure Range : 10 – 300 Pa

5-axis motorized stage

X : 0 -100mm; Y : 0-50mm; Z : 3–65mm; T : -20 - 90^o ; R : 360^o

up to 200 mm Ф; maximum stage 80 mm height

*1 : Top detector is option, combined to deceleration function.
*2 : Variable Pressure mode is option
*3 : Option
*4 : PD-BSE is Standart detector in Variable Pressure system