FE-SEM modern tidak hanya membutuhkan performa tinggi, tetapi juga berbagai fungsi, termasuk pengamatan area luas, analisis in-situ, variable pressure, pencitraan resolusi tinggi pada tegangan akselerasi rendah, dan pengumpulan multi-sinyal secara simultan.
SU7000 dirancang untuk menjawab aspek-aspek ini dan lebih banyak lagi dengan memberikan informasi yang lebih lengkap bagi beragam kebutuhan di bidang mikroskopi elektron.
Rasakan dunia nano dengan SU7000!
*Gambar pada monitor merupakan inset.
*Foto perangkat menunjukkan konfigurasi dengan item opsional.
| Image resolution | |
|---|---|
| Resolution SE | 0.8 nm@15 kV 0.9 nm@1 kV |
| General Characteristic | |
| Magnification | 20~2,000,000 x |
| Specimen Chamber | Specimen Size : Max. φ200 mm, Max. 67 mm Height |
| Monitor (option) | 23 inch LCD(1,920×1,080) , supports dual monitors operation |
| Image data saving | Pixel size : 640×480、1,280×960、2,560×1,920、5,120×3,840、10,240×7,680 |
| Optional accessories | Energy Dispersive X-ray Spectrometer (EDX) Wavelength dispersive X-ray Spectrometer (WDX) Electron Backscattered Diffraction Detector (EBSD) Cathodoluminescence system (CL) Cryogenic Transfer System Compatible with various types of sub-stages |
| Electron Optics | |
| Emitter | ZrO/W Schottky Emitter |
| Accelerating voltage | 0.1~30 kV (0.01 kV step) |
| Probe Current | Max. 200 nA |
| Detectors | |
| Standard detectors | UD (Upper Detector) MD (Middle Detector) LD (Lower Detector) |
| Optional detectors | PD-BSED(Semiconductor type) |
| Specimen stage | |
| Stage control | 5-axis Motor Drive |
| Movable range | X : 0~135 mm Y : 0~110 mm Z : 1.5~40 mm T : -5 ~70° R : 360° |
| Variable Pressure (VP) Mode (Option) | |
| Pressure range | 5~300 Pa |
| Available detectors in VP mode | PD-BSED, UVD, UD, MD,LD |
| Image Display Mode | |
| Large screen display mode | 1,280 x 960 pixels |
| Single image display mode | 800 x 600 pixels |
| Dual image display mode | 800×600 pixels、1,280×960 pixels with dual monitors |
| Quad image display mode | 640×480 pixels |
| Hex image display mode w/dual monitors | 640×480 pixels with dual monitors |
| Ultra-High-Resolution Schottky Scanning Electron Microscope SU7000.pdf |
|---|
